Preparation and Analysis of Yttria-Stabilized Zirconia Thin Film by CVD-EVD Method
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چکیده
منابع مشابه
Equilibrium Analysis of CVD of Yttria-Stabilized Zirconia
The calculations performed in this study indicate that efficient deposition of tetragonal yttria-stabilized zirconia ~YSZ! by chemical vapor deposition ~CVD! is feasible using metal chloride precursors ~Zr-Y-C-O-H-Cl system!. As reported in the literature, this work demonstrates that high oxygen content is necessary to efficiently utilize metal chloride precursors for depositing tetragonal YSZ ...
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ژورنال
عنوان ژورنال: Denki Kagaku oyobi Kogyo Butsuri Kagaku
سال: 1992
ISSN: 0366-9297,2434-2556
DOI: 10.5796/electrochemistry.60.240